Best MEMS Mirror Manufacturers for Solid State LiDAR

Quasi Solid State LiDAR uses MEMS mirrors which are microscopic tilting mirrors. These devices steer laser beams with incredible speed and precision without need for larger motors or bearings. Following are top MEMS mirror manufacturers dominating LiDAR market.

STMicroelectronics

It is leader in Piezoelectric MEMS (PZT), which offers higher force and speed than traditional electrostatic mirrors.

• Key part numbers : PM60 series, BGL series
• These parts are engineered for automotive grade reliability which are capable of withstanding high vibration environment of vehicle.

Infineon Technologies

Infineon’s LiDAR mirrors come from their acquisition of Innoluce, focusing on 1D resonant scanners that offer high reliability.

• Key part numbers : BGW series, BGY series
• Their resonant mirrors allow for a large field of regard (up to 40 to 60 degrees) with high speed performance, essential for detecting fast-moving objects on highways.

Mirrorcle Technologies

The company manufactures gimbal less design which allows for custom, non-linear scan paths.

• Key part numbers : A3I12.2 / A7M Series, Play-Zero™ Series
• Their “Point to Point” capability allows the LiDAR to perform foveated scanning, focusing maximum resolution on a specific hazard rather than scanning empty space.

Hamamatsu Photonics

The company specializes in electromagnetic MEMS mirrors, which can support large mirror surfaces than electrostatic models.

• Key part numbers : S13124-01, S12239 Series
• A larger aperture found in some products allows the sensor to collect more returning photons, which directly increases the maximum detection range of the LiDAR system.

Bosch Sensortec

The company focuses on integrated Light Beam Steering (LBS) modules that are incredibly compact, making them ideal for small robots and consumer devices.

• Key part numbers : BML100/BML050 series, BML100PI
• Bosch’s “Module” approach is perfect for companies looking for low complexity integration, as the mirror and electronics are pre-calibrated and ready for mass production.